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Experimental study and computer simulation of collimated sputtering of titanium thin films over topographical features
Liu, D., Dew, S. K., Brett, M. J., Janacek, T., Smy, T., Tsai, W.Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354889
File:
PDF, 969 KB
english, 1993