Experimental study and computer simulation of collimated...

Experimental study and computer simulation of collimated sputtering of titanium thin films over topographical features

Liu, D., Dew, S. K., Brett, M. J., Janacek, T., Smy, T., Tsai, W.
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Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354889
File:
PDF, 969 KB
english, 1993
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