[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Simulation of levitation control for a micromachined electrostatically levitated gyroscope
Xiao, Qijun, Chen, Wenyuan, Ma, Gaoyin, Cui, Feng, Li, Shengyong, Zhang, WeipingYear:
2009
Language:
english
DOI:
10.1109/NEMS.2009.5068549
File:
PDF, 5.49 MB
english, 2009