![](/img/cover-not-exists.png)
Summary Abstract: Intrinsic resputtering during sputter deposition
Hoffman, D. W.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575310
Date:
May, 1988
File:
PDF, 391 KB
english, 1988