Summary Abstract: Intrinsic resputtering during sputter...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1988 / 5 Vol. 6; Iss. 3

Summary Abstract: Intrinsic resputtering during sputter deposition

Hoffman, D. W.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575310
Date:
May, 1988
File:
PDF, 391 KB
english, 1988
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