Shape and Thermal Effects of Metal Films on Stress-Induced...

Japanese Journal of Applied Physics 2005 / 5 Vol. 44; Iss. 5A

Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever

Kuo, Ju-Nan, Lee, Gwo-Bin, Pan, Wen-Fung, Lee, Huei-Huang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.3180
Date:
May, 2005
File:
PDF, 386 KB
english, 2005
Conversion to is in progress
Conversion to is failed