Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1998 / 5 Vol. 16; Iss. 3
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A review of ion projection lithography
Melngailis, J.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590052
Date:
May, 1998
File:
PDF, 1.36 MB
english, 1998