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Room-temperature selective growth of dielectric films by liquid-phase deposition
Yeh, Ching-Fa, Chen, Chun-LinVolume:
9
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/9/6/015
Date:
June, 1994
File:
PDF, 409 KB
english, 1994