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Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
Yoshikawa, Genki, Lang, Hans-Peter, Akiyama, Terunobu, Aeschimann, Laure, Staufer, Urs, Vettiger, Peter, Aono, Masakazu, Sakurai, Toshio, Gerber, ChristophVolume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/1/015501
Date:
January, 2009
File:
PDF, 829 KB
english, 2009