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Mass-Spectrometric Studies of Catalytic Chemical Vapor Deposition Processes of Organic Silicon Compounds Containing Nitrogen
Morimoto, Takashi, Ansari, S. G., Yoneyama, Koji, Nakajima, Teppei, Masuda, Atsushi, Matsumura, Hideki, Nakamura, Megumi, Umemoto, HironobuVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.961
Date:
February, 2006
File:
PDF, 161 KB
english, 2006