Ion-Induced Auger Electron Emission from Si Surface

Ion-Induced Auger Electron Emission from Si Surface

Saiki, Koichiro, Tanaka, Shoji
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Volume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.L529
Date:
September, 1982
File:
PDF, 503 KB
1982
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