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Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements
Trusov, Alexander A., Prikhodko, Igor P., Zotov, Sergei A., Shkel, Andrei M.Volume:
11
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2011.2160338
Date:
November, 2011
File:
PDF, 1.95 MB
english, 2011