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Influence of Vacuum Cathodic Arc Etching on Structure and Properties of W-Doped DLC Films
Fu, Zhi Qiang, Wang, Cheng Biao, Yue, Wen, Peng, Zhi Jian, Lin, Song Sheng, Dai, Ming JiangVolume:
787
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.787.296
Date:
September, 2013
File:
PDF, 739 KB
english, 2013