Integration of a Piezoelectric Layer on Si FinFETs for...

IEEE Transactions on Electron Devices 2014 / 6 Vol. 61; Iss. 6

Integration of a Piezoelectric Layer on Si FinFETs for Tunable Strained Device Applications

Kaleli, Buket, Hueting, Raymond J. E., Nguyen, Minh D., Wolters, Rob A. M.
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2014.2316164
Date:
June, 2014
File:
PDF, 1.84 MB
english, 2014
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