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Substantial Enhancement of the Dielectric Properties of Amorphous ${\rm Y}_{2}{\rm O}_{3}{-}{\rm TiO}_{2}$ Composition Spreads Through ${\rm N}_{2}$ Doping Using Combinatorial Sputtering
Chang, Kao-Shuo, Feng, Hao-Che, Chen, Chun-Lin, Lu, Wen-ChungVolume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2014.2318303
Date:
June, 2014
File:
PDF, 1.16 MB
english, 2014