Feasibility Study of ${\rm SrRuO}_{3}/{\rm SrTiO}_{3}/{\rm...

IEEE Transactions on Electron Devices 2014 / 6 Vol. 61; Iss. 6

Feasibility Study of ${\rm SrRuO}_{3}/{\rm SrTiO}_{3}/{\rm SrRuO}_{3}$ Thin Film Capacitors in DRAM Applications

Popescu, Dan, Popescu, Bogan, Jegert, Gunther, Schmelzer, Sebastian, Boettger, Ulrich, Lugli, Paolo
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2014.2314148
Date:
June, 2014
File:
PDF, 2.15 MB
english, 2014
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