Determining electron temperature and electron density in moderate pressure H 2 /CH 4 microwave plasma
Derkaoui, N, Rond, C, Gries, T, Henrion, G, Gicquel, AVolume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/20/205201
Date:
May, 2014
File:
PDF, 430 KB
english, 2014