Novel method for dimensional measurements of nanorelief...

Measurement Science and Technology 2014 / 04 Vol. 25; Iss. 4

Novel method for dimensional measurements of nanorelief elements based on electron probe defocusing in a scanning electron microscope

Filippov, M N, Gavrilenko, V P, Mityukhlyaev, V B, Rakov, A V, Todua, P A
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/4/044008
Date:
April, 2014
File:
PDF, 1.44 MB
english, 2014
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