Formation of Si nanocrystals in ion implanted Si-SiO...

Journal of Physics Conference Series 2012 / 03 Vol. 356

Formation of Si nanocrystals in ion implanted Si-SiO 2 structures by MeV electron irradiation

Kaschieva, S, Gushterov, A, Angelov, Ch, Dmitriev, S N
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Volume:
356
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/356/1/012005
Date:
March, 2012
File:
PDF, 1.30 MB
english, 2012
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