[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Fabrication of silicon highly-rich SiOx(x
Wang, Yue-Fei, Qian, Xin-Ye, Chen, Kun-Ji, Fang, Zhong-Hui, Li, Wei, Xu, JunYear:
2012
Language:
english
DOI:
10.1109/ICSICT.2012.6467606
File:
PDF, 319 KB
english, 2012