[IEEE 2013 IEEE 10th International Conference on ASIC...

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[IEEE 2013 IEEE 10th International Conference on ASIC (ASICON 2013) - Shenzhen, China (2013.10.28-2013.10.31)] 2013 IEEE 10th International Conference on ASIC - Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer

Xiaoxu Kang,, Chao Yuan,, Qingyun Zuo,, Changwa Yao,, Shoumian Chen,, Yuhang Zhao,, Yilin Yan,, Yuanjun Xu,, Weiping Zhou,
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Year:
2013
Language:
english
DOI:
10.1109/ASICON.2013.6811942
File:
PDF, 318 KB
english, 2013
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