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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm
Huang, Chien-Hsin, Tsai, Ming-Han, Lee, Chien-Hsing, Hsieh, Tsung-Min, Liou, Jhyy-Cheng, Chen, Li-Che, Yip, Ming-Chuen, Fang, WeileunYear:
2011
Language:
english
DOI:
10.1109/TRANSDUCERS.2011.5969162
File:
PDF, 960 KB
english, 2011