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Resonant silicon accelerometers in bulk micromachining technology-an approach
Burrer, C., Esteve, J., Lora-Tamayo, E.Volume:
5
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.506200
Date:
June, 1996
File:
PDF, 1.44 MB
english, 1996