Mechanisms in Metal-Organic Chemical Vapour Deposition [and...

Philosophical Transactions Mathematical Physical & Engineering Sciences 1990 / 02 Vol. 330; Iss. 1610

Mechanisms in Metal-Organic Chemical Vapour Deposition [and Discussion]

Williams, J. O., Hoare, R. D., Khan, O., Parrott, M. J., Cole-Hamilton, D. J., Griffiths, R. J. M.
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Volume:
330
Language:
english
Journal:
Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
DOI:
10.1098/rsta.1990.0012
Date:
February, 1990
File:
PDF, 1.27 MB
english, 1990
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