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film roughness and stress
Zhou, Lan, Wang, Yiping, Zhou, Hua, Li, Minghao, Headrick, Randall L., MacArthur, Kimberly, Shi, Bing, Conley, Ray, Macrander, Albert T.Volume:
82
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.82.075408
Date:
August, 2010
File:
PDF, 1.15 MB
english, 2010