Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure
Lien, Wei-Cheng, Cheng, Kan Bun, Senesky, Debbie G., Carraro, Carlo, Pisano, Albert P., Maboudian, RoyaVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3418619
File:
PDF, 448 KB
english, 2010