MEMS Mechanical Fatigue: Effect of Mean Stress on Gold...

Journal of Microelectromechanical Systems 2011 / 08 Vol. 20; Iss. 4

MEMS Mechanical Fatigue: Effect of Mean Stress on Gold Microbeams

De Pasquale, Giorgio, Soma, Aurelio
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2160044
Date:
August, 2011
File:
PDF, 745 KB
english, 2011
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