Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma
Shimada, Masashi, Tynan, George R, Cattolica, RobertVolume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/1/024
Date:
February, 2007
File:
PDF, 261 KB
english, 2007