Neutral gas density depletion due to neutral gas heating...

Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma

Shimada, Masashi, Tynan, George R, Cattolica, Robert
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Volume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/1/024
Date:
February, 2007
File:
PDF, 261 KB
english, 2007
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