Processing and Characterization of a MOS-Type Tetra Lateral...

IEEE Sensors Journal 2008 / 10 Vol. 8; Iss. 10

Processing and Characterization of a MOS-Type Tetra Lateral Position Sensitive Detector With Indium Tin Oxide Gate Contact

Andersson, Henrik A., Bertilsson, Kent, Thungstrom, GÖran, Nilsson, Hans-Erik
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Volume:
8
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2008.2004303
Date:
October, 2008
File:
PDF, 996 KB
english, 2008
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