[IEEE 2007 International Workshop on Physics of Semiconductor Devices - Mumbai, India (2007.12.16-2007.12.20)] 2007 International Workshop on Physics of Semiconductor Devices - Effect of nitridation on Al/HfO2/Ge MIS capacitors
Kailath, Binsu J., Bhattacharya, Sekhar, DasGupta, Amitava, DasGupta, Nandita, McNeill, D.W., Gamble, H.Year:
2007
Language:
english
DOI:
10.1109/IWPSD.2007.4472483
File:
PDF, 209 KB
english, 2007