Continuous phase-shift lithography with a roll-type mask...

Nanotechnology 2012 / 08 Vol. 23; Iss. 34

Continuous phase-shift lithography with a roll-type mask and application to transparent conductor fabrication

Kwak, Moon Kyu, Ok, Jong G, Lee, Jae Yong, Guo, L Jay
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Volume:
23
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/23/34/344008
Date:
August, 2012
File:
PDF, 1.57 MB
english, 2012
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