Optical and electrical properties of a-C:H deposited by...

Diamond and Related Materials 1999 / 3 Vol. 8; Iss. 2-5

Optical and electrical properties of a-C:H deposited by magnetic confinement of r.f. PECVD plasma

Tomozeiu, N, Hart, A, Kleinsorge, B, Milne, W.I
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Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00446-4
Date:
March, 1999
File:
PDF, 185 KB
english, 1999
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