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Precursors of diamond films analysed by molecular beam mass spectrometry of microwave plasmas
Aubry, O, Delfau, J.-L, Met, C, Vandenbulcke, L, Vovelle, CVolume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.09.009
Date:
January, 2004
File:
PDF, 712 KB
english, 2004