Lift-off technique of homoepitaxial CVD diamond films by...

Diamond and Related Materials 1997 / 4 Vol. 6; Iss. 5-7

Lift-off technique of homoepitaxial CVD diamond films by deep implantation and selective etching

Locher, R., Behr, D., Güllich, H., Herres, N., Koidl, P., Samlenski, R., Brenn, R.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(96)00662-0
Date:
April, 1997
File:
PDF, 892 KB
english, 1997
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