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Measurement of oxygen-diffusion-profiles in silicon-single-crystals by means of the nuclear reaction 18O(p, α)15N
J.E. Gass, H.H. Müller, H. Schmied, L. Jörissen, G. ZiffermayerVolume:
106
Year:
1973
Language:
english
Pages:
5
DOI:
10.1016/0029-554x(73)90052-9
File:
PDF, 354 KB
english, 1973