A new method of thin-film thickness measurement using...

Nuclear Instruments and Methods 1974 Vol. 121; Iss. 2

A new method of thin-film thickness measurement using radioisotope Auger electrons

Chizuo Moria, Jun Koike, Tamaki Watanabe
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Volume:
121
Year:
1974
Language:
english
Pages:
6
DOI:
10.1016/0029-554x(74)90073-1
File:
PDF, 408 KB
english, 1974
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