Chemical conversion of Si to SiC by solid source MBE and...

Diamond and Related Materials 1997 / 8 Vol. 6; Iss. 10

Chemical conversion of Si to SiC by solid source MBE and RTCVD

Pezoldt, J., Cimalla, V., Stauden, Th., Ecke, G., Eichhorn, G., Scharmann, F., Schipanski, D.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00087-3
Date:
August, 1997
File:
PDF, 1.32 MB
english, 1997
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