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Diamond nucleation in low electron temperature CH4/H2 plasma
Iizuka, Satoru, Nishimura, Gouki, Ikada, Reijiro, Yamaguchi, HideyukiVolume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.01.040
Date:
March, 2005
File:
PDF, 157 KB
english, 2005