Interactions of Ta-filaments during hot-filament CVD of...

Diamond and Related Materials 2002 / 2 Vol. 11; Iss. 2

Interactions of Ta-filaments during hot-filament CVD of BCN-layers

Weissenbacher, R, Haubner, R, Aigner, K, Lux, B
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Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00567-2
Date:
February, 2002
File:
PDF, 1.68 MB
english, 2002
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