Facile fabrication of sub-20-nm nanochannels based on...

Microelectronic Engineering 2012 / 10 Vol. 98

Facile fabrication of sub-20-nm nanochannels based on crystallinity-dependent anisotropic etching of silicon

Song, Youngsup, Kim, Min-Ook, Kwon, Dae-sung, Kim, Yong-Jun, Kim, Jongbaeg
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.100
Date:
October, 2012
File:
PDF, 659 KB
english, 2012
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