The sputtering of PtSi and NiSi
J.M. Poate, W.L. Brown, R. Homer, W.M. Augustyniak, J.W. Mayer, K.N. Tu, W.F. van der WegVolume:
132
Year:
1976
Language:
english
Pages:
5
DOI:
10.1016/0029-554x(76)90756-4
File:
PDF, 397 KB
english, 1976