An investigation of the mass spectra of secondary ions...

An investigation of the mass spectra of secondary ions ejected from the single crystal surface of semiconductors

A.G. Koval', V.N. Mel'Nikov, Yu.V. Enukov
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Volume:
132
Year:
1976
Language:
english
Pages:
5
DOI:
10.1016/0029-554x(76)90777-1
File:
PDF, 272 KB
english, 1976
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