Investigation of micropipe and defects in molten KOH...

Materials Letters 2013 / 06 Vol. 101

Investigation of micropipe and defects in molten KOH etching of 6H n-silicon carbide (SiC) single crystal

Mahajan, Sandeep, Rokade, M.V., Ali, S.T., Srinivasa Rao, K., Munirathnam, N.R., Prakash, T.L., Amalnerkar, D.P.
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Volume:
101
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2013.03.079
Date:
June, 2013
File:
PDF, 1.58 MB
english, 2013
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