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Surface modifications of amorphous hydrogenated carbon films submitted to carbon tetrafluorine plasma treatment
da Costa, M.E.H. Maia, Freire, F.L.Volume:
22
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.10.025
Date:
February, 2012
File:
PDF, 583 KB
english, 2012