Backscattering analysis of impurities in the ion beams

Nuclear Instruments and Methods 1978 Vol. 152; Iss. 2-3

Backscattering analysis of impurities in the ion beams

Yuen-Chung Liu, Cheng-Fong Chou, Wu-Shiung Hsu, Jer-Shen Maa
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Volume:
152
Year:
1978
Language:
english
Pages:
4
DOI:
10.1016/0029-554x(78)90030-7
File:
PDF, 244 KB
english, 1978
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