Structures with a minimum feature size of less than 100 nm...

Diamond and Related Materials 2001 / 3 Vol. 10; Iss. 3-7

Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications

Otterbach, R., Hilleringmann, U., Horstmann, T.J., Goser, K.
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00373-9
Date:
March, 2001
File:
PDF, 278 KB
english, 2001
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