Investigation of thermally grown oxide on 4H-SiC by a combination of H2O and HNO3 vapor with varied HNO3 solution heating temperature
Poobalan, Banu, Moon, Jeong Hyun, Kim, Sang-Cheol, Joo, Sung-Jae, Bahng, Wook, Kang, In Ho, Kim, Nam-Kyun, Cheong, Kuan YewVolume:
285
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.08.131
Date:
November, 2013
File:
PDF, 2.53 MB
english, 2013