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Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating
Csorbai, H., Kováts, A., Kátai, S., Hárs, G., Dücsō̄, C., Kálmán, E., Deák, P.Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00027-4
Date:
March, 2002
File:
PDF, 1.03 MB
english, 2002