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Analysis on microstructure of interface layer in DLC/Si structures produced by FIB–CVD
Sakamoto, Naomichi, Kogo, Yasuo, Yasuno, Takuya, Taniguchi, Jun, Miyamoto, IwaoVolume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.058
Date:
July, 2008
File:
PDF, 967 KB
english, 2008