Chemical kinetics in carbon depositing d.c.-arc jet CVD...

Diamond and Related Materials 2003 / 3 Vol. 12; Iss. 3-7

Chemical kinetics in carbon depositing d.c.-arc jet CVD reactors

Mankelevich, Yu.A., Suetin, N.V., Ashfold, M.N.R., Boxford, W.E., Orr-Ewing, A.J., Smith, J.A., Wills, J.B.
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00272-8
Date:
March, 2003
File:
PDF, 211 KB
english, 2003
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