Projectile-energy dependence of compositional changes...

Projectile-energy dependence of compositional changes produced in sputtering of a dilute Si(Fe, W) alloy

K. Wittmaack, P. Blank
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Volume:
170
Year:
1980
Language:
english
Pages:
5
DOI:
10.1016/0029-554x(80)91035-6
File:
PDF, 316 KB
english, 1980
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