Argon gas dilution effect on the properties of amorphous...

Diamond and Related Materials 2007 / 4 Vol. 16; Iss. 4-7

Argon gas dilution effect on the properties of amorphous carbon nitride thin films

Aryal, Hare Ram, Adhikari, Sudip, Ghimire, Dilip Chandra, Uchida, Hideo, Umeno, Masayoshi
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Volume:
16
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.12.033
Date:
April, 2007
File:
PDF, 340 KB
english, 2007
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